供應寶德氣體質量流量調節器，BURKERT流量調節器主要參數

上海乾拓貿易有限公司 

　企業QQ：2880626087

　電話；021-69001039

　手機；17321017802（微信）

　郵箱；17321017802@163.com

　地址：上海市嘉定區江橋嘉涌路99弄6號713室

采用毛細管技術的旁通儀器，適合額定流量范圍 5 mlN/min 至 15 lN/min

適合侵蝕性氣體

緊湊型版本和數字通訊

For selecting the correct product please refer to the technical data,

 images and notes for proper use according to the data sheet.

 This instrument communicates digitally with master devices, no further A/D conversions needed. 

The MassFlowCommunicator software can be used for parameterisation and diagnosis.

Full scale range1) (Qnom) 

5 to 15000 mlN/min2) N2 equivalent Control range 1:50 Operating gases Neutral, 

or aggressive gases Calibration gas Operating gas or air with conversion factor Max. 

operating pressure (Inlet pressure) 10 bar (145 psi),

 depending on the ori? ce of the valve Medium temperature -10 to +70°C (-10 to +60°C for oxygen) Ambient temperature -10 to +50°C3), 

others on request Accuracy ±1.5% o.R. ±0.3% F.S. (after 30min. warm-up time) Repeatability ±0.1% F.S.

 Settling time (t95%) <3 s Materials Body Housing Seals Stainless steel PC (Polycarbonate) or metal FKM,

 EPDM or FFKM Port connections NPT 1/4, G 1/4, Screw-in ? tting or sub-base, others on request Control valve (proportional valve) Valve ori? ce kvs-value Normally closed 0.05 to 2.0 mm 0.00006 to 0.09 m3/h

? Bypass MFC with capillary technology for     nominal flow rates from 5 mlN/min to 15 lN/min 

? Applicable for aggressive gases ? Compact design and digital communication

Mass Flow Controller (MFC) for Gases

Type 8715 controls the mass ? ow of gases through a sensor element which is not in direct contact with the gas itself.

 The measured value provided by the sensor (see the description on page 

2) will be compared in the digital control electronics with the prede? ned set point according to the signal; 

if a control difference is present, the control value output to the proportional valve will be modi? ed using a PI control algorithm. 

In this way, the mass ? ow can be maintained at a ? xed value or a prede? ned pro? le can be followed, 

regardless of pressure variations or other changes in the system.  

Type 8715 can optionally be calibrated for two different gases, 

the user can switch between these two gases.

 As control element a direct-acting proportional valve guarantees a high sensitivity and a good control characteristics of the MFC.

型號 8715 是一臺用于調節侵蝕性氣體質量流量的裝置，它需要一個與介質相分離的傳感器。

在數字的電子調節設備中，會將傳感器提供的實際值與規定的額定值進行比較；

存在調節偏差時，會通過一種 PI 調節算法對發送到比例閥上的調節參數進行修改。

這樣一來，就可以將質量流量保持在一個確定的數值上，或使其遵循規定的曲線輪廓，而不會受到壓力波動或設備中其他變化的影響。

 可針對兩種不同的氣體對型號 8715 進行校準，用戶可在兩者之間進行轉換。

一個直動式比例閥作為調節元件，確保了高反應靈敏度和裝置良好的調節特性。通過數字方式與更高一級的設備進行通訊，

這樣一來，就可以省去額外的 D/A 轉換。

Electr. connection D-Sub plug 9-pin Power supply 24V DC Voltage tolerance ±10 % Residual ripple <2 % Power consumption 3.5 - 11.5 W (depends on proportional vale) Communication Digital via RS485 (half duplex or full duplex), RS422 Protection class IP40 Dimensions [mm]  

 See drawings on pages 5 and 6 Total weight ca. 850 g (stainless steel) Mounting position Horizontal or vertical Light emitting diode display   (default, other allocations possible) Indication for Power, Limit Error Binary input (default, other functions possible) Start Autotune Binary output (default, 

other functions possible) One relay-output for 1. setpoint not reached, Max. load: 25V, 1A, 25VA

Technical data

1)    The nominal ? ow value is the max. ? ow value calibrated which can be controlled. The nominal ? ow range de? nes the range of nominal ? ow rates (full scale values) possible. 2)  Index N: Flow rates referred to 1.013 bar and 0° C. Alternatively there is an Index S available which refers to 1.013 bar and 20o C 3) When an internal 5 W valve is used: Max. 40oC

供應寶德氣體質量流量調節器，BURKERT流量調節器主要參數